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November 1, 1985Journal of Applied Physics

Frequency dependence of ion bombardment of grounded surfaces in rf argon glow discharges in a planar system

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Authors

KKKlaus KöhlerTechnical University of MunichDHD. E. HorneIBM Research - AlmadenJCJ. W. CoburnUniversity of Utah

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Köhler et al. (1985) studied this question.

synapsesocial.com/papers/6a7095d331a3df824328d669https://doi.org/10.1063/1.335797
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