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December 18, 2008Journal of Physics D Applied Physics

PIC simulations of the separate control of ion flux and energy in CCRF discharges via the electrical asymmetry effect

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ZDZoltán DonkóHUN-REN Wigner Research Centre for PhysicsJSJulian SchulzeRuhr University BochumBHB. HeilRuhr University Bochum

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Donkó et al. (2008) studied this question.

synapsesocial.com/papers/6a7096225671bbf00bc2bb07https://doi.org/10.1088/0022-3727/42/2/025205
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