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March 1, 1993Journal of Applied Physics

Spatiotemporal optical emission spectroscopy of rf discharges in SF6

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ZPZoran PetrovićSerbian Academy of Sciences and ArtsFTFumiyoshi TochikuboTokyo Metropolitan UniversitySKShigeru KakutaHitachi (Japan)

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Petrović et al. (1993) studied this question.

synapsesocial.com/papers/6a709644a528af2d65c39e47https://doi.org/10.1063/1.353118
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