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April 1, 1975Journal of Applied Physics

Experiments on the origin of process−induced recombination centers in silicon

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CSC. T. SahUniversity of FloridaCWC. T. WangUniversity of Illinois Urbana-Champaign

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Sah et al. (1975) studied this question.

synapsesocial.com/papers/6a70fed2e71d69abee08fb1ahttps://doi.org/10.1063/1.321758
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