What question did this study set out to answer?

To assess the feasibility of magnetic recording media where each individual bit is stored in an isolated single-domain magnetic particle.

November 1, 1994Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Submicron patterning of thin cobalt films for magnetic storage

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Authors

RNR. M. H. NewIBM (United States)RPR. F. W. PeaseStanford University RWRobert L. WhiteUniversity of Oklahoma

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Implication

Experimental study demonstrates high-resolution patterning of cobalt thin films down to 0.1 μm, highlighting potential for single-domain particle magnetic recording.

Key Points

To assess the feasibility of magnetic recording media where each individual bit is stored in an isolated single-domain magnetic particle.
Fabricated submicron magnetic islands using direct-write electron-beam lithography paired with a multistep sputter etching process.
Characterized structural separation and surface integrity across polycrystalline and epitaxial films using atomic force microscopy (AFM) and X-ray photoemission spectroscopy (XPS).
Successfully patterned discrete magnetic thin-film islands with feature sizes scaled down to 0.1 μm.
Verified complete physical isolation of magnetic islands while avoiding significant chemical or physical damage across multiple magnetic film types.

Cite This Study

New et al. (1994) studied this question.

synapsesocial.com/papers/6a71269c31a3df8243295da2 https://doi.org/10.1116/1.587499

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Implication

Experimental study demonstrates high-resolution patterning of cobalt thin films down to 0.1 μm, highlighting potential for single-domain particle magnetic recording.

Submicron patterning of thin cobalt films for magnetic storage

Discussion

Member takes

Implication

Key Points

Cite This Study

Submicron patterning of thin cobalt films for magnetic storage

Discussion

Member takes

Implication

Key Points

Cite This Study

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