What question did this study set out to answer?

To evaluate the feasibility of ion projection direct structuring for full-surface patterning of magnetic storage media using a next-generation lithography projector.

September 1, 2002IEEE Transactions on Magnetics

Ion projection direct structuring for patterning of magnetic media

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Authors

ADAndreas DietzelTechnische Universität Braunschweig RBRüdiger BergerMax Planck Institute for Polymer Research HGH. GrimmGeneral Electric (United States)

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Implication

Experimental study demonstrates single-step ion projection patterning on magnetic media without changing roughness, indicating strong potential for high-density storage manufacturing.

Key Points

To evaluate the feasibility of ion projection direct structuring for full-surface patterning of magnetic storage media using a next-generation lithography projector.
Deposited cobalt-platinum (Co-Pt) multilayer films exhibiting strong perpendicular magnetic anisotropy onto 1-inch glass disks and silicon substrates.
Patterned concentric tracks, data zones, and servo positioning structures via a single exposure step using 45 keV He+ ions at 4× demagnification.
Fabricated sub-100-nm magnetic islands at 8.7× demagnification and characterized surface magnetic features using magnetic force microscopy.
Achieved full concentric data track and head-positioning servo structure patterning in a single exposure without altering the surface roughness of the media.
Successfully generated isolated sub-100-nm magnetic islands at 8.7× projection demagnification, verified via magnetic force microscopy.

Cite This Study

Dietzel et al. (2002) studied this question.

synapsesocial.com/papers/6a737f078317ef39e84e6187 https://doi.org/10.1109/tmag.2002.802846

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Implication

Experimental study demonstrates single-step ion projection patterning on magnetic media without changing roughness, indicating strong potential for high-density storage manufacturing.

Ion projection direct structuring for patterning of magnetic media

Discussion

Member takes

Implication

Key Points

Cite This Study

Ion projection direct structuring for patterning of magnetic media

Discussion

Member takes

Implication

Key Points

Cite This Study

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