Preparation of Lead Zirconate Titanate Thin Films by Reactive Evaporation

Lead zirconate titanate thin films have been successfully fabricated by reactive evaporation. Elemental Pb, Zr, and Ti were evaporated in ozone-oxygen mixture ambient. Excellent controls of uniformity of thickness and composition were achieved over a large area (within ±2% on 4-inch wafer). The electrical properties were examined as a function of Pb content in the films. High dielectric constant (ε∼1000) and low leakage current ( 1.7×10 -7 A/cm 2 ) were realized for the film with stoichiometric composition.