Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
December 4, 2003Journal of Applied PhysicsOpen Access

Mode transition for power dissipation induced by driving frequency in capacitively coupled plasma

View Full Paper
Ask AI
Bookmark
Share

Authors

SYS. J. YouChungnam National UniversityHKHaewon C. KimChildren's Hospital of PhiladelphiaCCC. W. ChungKorea Advanced Institute of Science and Technology

Discussion

Loading...

Member takes

Overview

Key Points

Key points are not available for this paper at this time.

Cite This Study

You et al. (2003) studied this question.

synapsesocial.com/papers/6a71ec402163a0a01bc5d8fchttps://doi.org/10.1063/1.1621085
View Full Paper
Ask AI
Bookmark
Share

Also Consider

Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Heating Mode Transition Induced by a Magnetic Field in a Capacitive rf Discharge1996 · 101 citations
  2. 2Dynamic model of the electrode sheaths in symmetrically driven rf discharges1990 · 273 citations
  3. 3Measurement of electron energy distribution in low-pressure RF discharges1992 · 763 citations
  4. 4Ion flux and ion power losses at the electrode sheaths in a symmetrical rf discharge1991 · 64 citations
  5. 5Effect of Variable Ionic Mobility on Ambipolar Diffusion1957 · 176 citations