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August 1, 1990Physical Review A

Dynamic model of the electrode sheaths in symmetrically driven rf discharges

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VGValery GodyakClark UniversityNSNatalia SternbergClark University

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Godyak et al. (1990) studied this question.

synapsesocial.com/papers/69d88ae3d56ca42147d18b8dhttps://doi.org/10.1103/physreva.42.2299
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