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November 1, 1986Journal of Applied Physics

Application of the physics of plasma sheaths to the modeling of rf plasma reactors

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Authors

AMArmin MetzeUniversity of MinnesotaDED. W. ErnieUniversity of MinnesotaHOH. J. OskamUniversity of Minnesota

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Metze et al. (1986) studied this question.

synapsesocial.com/papers/6a87ff74d79ae02bd34dec4bhttps://doi.org/10.1063/1.337764
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