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January 1, 1983Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Rf sputtering–voltage division between two electrodes

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Authors

CHC. M. HorwitzThe University of Sydney

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C. M. Horwitz (1983) studied this question.

synapsesocial.com/papers/6a87feb4c0c64b7dddeb3398https://doi.org/10.1116/1.572311
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