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October 1, 1986Japanese Journal of Applied PhysicsOpen Access

Analytical Investigation of Plasma and Electrode Potentials in a Diode Type RF Discharge

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Authors

KSKeizô SuzukiSapporo Medical UniversityKNKen NinomiyaKeio UniversitySNShigeru NishimatsuHitachi (Japan)

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Suzuki et al. (1986) studied this question.

synapsesocial.com/papers/6a8420cdc967ec513cbd89achttps://doi.org/10.1143/jjap.25.1569
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