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March 15, 1991Journal of Applied Physics

Ion flux and ion power losses at the electrode sheaths in a symmetrical rf discharge

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Authors

VGValery GodyakClark UniversityRPR. B. PiejakOSRAM (United States)BAB. M. AlexandrovichUniversity of Michigan

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Godyak et al. (1991) studied this question.

synapsesocial.com/papers/6a828ebdaa66c98ddba0becfhttps://doi.org/10.1063/1.348530
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