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June 17, 1991Applied Physics Letters

Microstructure of erbium-implanted Si

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DED. J. EagleshamAustralian National UniversityJMJürgen MichelMassachusetts Institute of TechnologyEFEugene A. FitzgeraldMassachusetts Institute of Technology

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Eaglesham et al. (1991) studied this question.

synapsesocial.com/papers/6a71ef8d78a11c550e0bdd57https://doi.org/10.1063/1.104739
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