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February 15, 1982Applied Physics Letters

Diffusivity of oxygen in silicon during steam oxidation

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JMJ. C. MikkelsenStanford University

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J. C. Mikkelsen (1982) studied this question.

synapsesocial.com/papers/6a71ef8d78a11c550e0bdd5chttps://doi.org/10.1063/1.93089
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