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September 15, 1986Journal of Applied Physics

Infrared optical properties of silicon oxynitride films: Experimental data and theoretical interpretation

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TEThomas ErikssonChalmers University of TechnologyCGClaes‐Göran GranqvistUppsala University

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Eriksson et al. (1986) studied this question.

synapsesocial.com/papers/6a72091b2163a0a01bc5e786https://doi.org/10.1063/1.337212
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Also Consider

Synapse has enriched 4 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Structural Evaluation of Silicon Oxide Films1965 · 349 citations
  2. 2Infrared and Raman Spectra of Polyatomic Molecules.1946 · 3,330 citations
  3. 3Optical Properties of Silicon Nitride1973 · 467 citations
  4. 4Determination of optical constants of absorbing materials using transmission and reflection of thin films on partially metallized substrates: analysis of the new (T,Rm) technique1981 · 74 citations