A bulk acoustic wave filter composed of piezoelectric thin-film resonators has many features superior to those of other small filters such as a surface acoustic wave (SAW) filter and a ceramic filter. A high- Q factor and low loss are big advantages for a film bulk acoustic resonator (FBAR). The electrode material that is selected is very important for maintaining a high- Q and appropriate coupling factor. An analysis of the effects of acoustic impedance on AlN-based FBAR performance is described. The electromechanical coupling factor ( k 2 ) and filter loss were found to be influenced by acoustic impedance and to be mainly dominated by Young's modulus. Ru was found by analysis and experiments to be a suitable material for the electrode. Finally, a 2 GHz wide band code division multiple access (WCDMA) filter was demonstrated to have a good performance.
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Ueda et al. (2007) studied this question.
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