Transparent films of Fe-doped indium tin oxide (ITO) were grown at oxygen pressures of 5, 1, 10 -1 , 10 -2 , and 10 -3 Pa on yttria-stabilized zirconia (001) substrates by a pulsed-laser deposition method. We observed X-ray diffraction peaks from (00 h ) planes of In 2 O 3 crystalline phase for the films. The films grown at 5 and 1 Pa were paramagnetic and semiconducting, that at 10 -1 Pa was ferromagnetic and semiconducting, and those at 10 -2 and 10 -3 Pa were ferromagnetic and metallic. The Fe-ITO films grown below 10 -1 Pa exhibited room-temperature (RT) ferromagnetism. Nanoscale Fe clusters in the highest oxidation state such as γ-Fe 2 O 3 resulted in the RT ferromagnetism.
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Ohno et al. (2006) studied this question.
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