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July 1, 1970Applied Physics LettersOpen Access

A Study of Diffused Layers of Arsenic and Antimony in Silicon Using the Ion-Scattering Technique

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Authors

SCShun-Ren ChouTatung UniversityLDL. A. DavidsonUniversity of St AndrewsJGJ. F. GibbonsUniversity College Dublin

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Chou et al. (1970) studied this question.

synapsesocial.com/papers/6a72bc6afe4101aa97e0ec3bhttps://doi.org/10.1063/1.1653237
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