Study of device parameters for analog IC design in a 1.2 mu m CMOS-SOI technology after 10 Mrad (for hadron colliders)

Radiation-hardened SOI-CMOS is a candidate technology for mixed analog-digital signal processing electronics in experiments at future high luminosity hadron colliders. In view of this application, the analog parameters of transistors realized in the Thomson TMS HSO13-HD technology were studied before and after exposure to total doses similar to those expected in the CERN Large Hadron Collider (LHC). The devices were irradiated up to 10 Mrad with /sup 60/Co and 3*10/sup 14/ neutrons/cm/sup 2/. The changes in the threshold voltage V/sub th/ of front and back gates, leakage current, and transconductance are studied. Subthreshold slope and charge pumping techniques were used to estimate the interface state formation. Noise measurements in the 0.1-kHz to 3-MHz bandwidth range were performed. The noise is comparable to that of a bulk CMOS process. Postirradiation effects were regularly monitored, and threshold voltage rebound for n-channel transistors was observed.>