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January 1, 1992Proceedings of the IEEE

UHV/CVD growth of Si and Si:Ge alloys: chemistry, physics, and device applications

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BMB.S. MeyersonJohannes Kepler University of Linz

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B.S. Meyerson (1992) studied this question.

synapsesocial.com/papers/6a74bf981646b2abe5033724https://doi.org/10.1109/5.168668
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