Answers are grounded in this paper and cite their sources.
An ultra-deep polymer cavity structure exposed using deep X-ray lithography is used as a template for metal electroforming to produce a 24-GHz cavity resonator. The metal cavity is 1.8 mm deep and has impressive structure, including extremely vertical and smooth sidewalls, resulting in low conductor loss. The measured resonator has an unloaded quality factor of above 1800 at a resonant frequency of 23.89 GHz.
No takes yet. Share an insight, caveat, or question.
Ma et al. (2007) studied this question.
Synapse has enriched 10 related papers. Consider them for comparative context: