Preparation of Epitaxial Pb(Zr, Ti)O₃ Thin Films on Nb-Doped SrTiO₃ (100) Substrates by Dipping-Pyrolysis Process

Epitaxially grown Pb(Zr, Ti)O 3 (PZT, Pb:Zr:Ti=1:0.52:0.48) thin films were prepared on Nb-doped SrTiO 3 (100) substrates by dipping-pyrolysis process with metal naphthenates used as starting materials. The alignments of the films were investigated based on X-ray diffraction (XRD) θ–2θ scans, β scans (pole figures), and asymmetric ω–2θ scans (reciprocal-space maps). Epitaxial films with smooth surfaces were obtained by heat treatment of prefired films at 600°–750° C; a film heat-treated at 750° C showed the strongest peak intensities in the XRD θ–2θ scans. These PZT films were found by reciprocal-space map analysis to consist of the c -axis-oriented tetragonal phase.