The profound influence of low‐temperature processing steps, hitherto assumed benign from the viewpoint of texture development, is reported. On inclusion of a 400°C step and further heat treatment at 700°C, PZT (40/60) sol‐gel thin films with a strong (111) texture were obtained. When the 400°C step was excluded, the films exhibited a strong (100) texture. The (111) PZT texture development is nucleation‐controlled and is attributed to the solid‐phase epitaxial effect. The (100) texture is considered growth‐controlled in that (100) oriented grains grow preferentially so as to minimize surface energy.
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Liu et al. (1996) studied this question.