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January 1, 1965Journal of Applied Physics

Thin Films Deposited by Bias Sputtering

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Authors

LML. I. MaisselPoughkeepsie Public Library DistrictPSPhilipp SchaibleKarlsruhe Institute of Technology

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Maissel et al. (1965) studied this question.

synapsesocial.com/papers/6a75dd8ff56d87d9178b6e45https://doi.org/10.1063/1.1713883
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