Si–H Bonds on the 6H–SiC(0001) Surface after H₂ Annealing

The Si–H bonds on the 6H–SiC(0001) on-axis surface were investigated using Fourier-transformed infrared attenuated total reflection (FTIR-ATR). The clear absorption bands of the Si–H stretching vibrations were observed from the 6H–SiC(0001) on-axis surface after H 2 annealing. The configuration of the Si–H bonds on the surface was discussed from the polarized spectra, the chemical characteristics and the electronegativities of the atoms bonded to the Si. The FTIR-ATR spectra suggested that the 6H–SiC(0001) on-axis surface after H 2 annealing at 1000° C was primarily terminated by silicon monohydride with high regularity.