What question did this study set out to answer?

To determine how chemical impurities, free electrons, and boundary scattering govern thermal conduction in thin, free-standing single-crystal silicon layers across a broad temperature range.

April 15, 2002Journal of Applied Physics

Thermal conduction in doped single-crystal silicon films

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Authors

MAMehdi AsheghiStanford University KKKatsuo KurabayashiNew York University RKReza KasnaviIntegrated Systems Solutions (United States)

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Implication

Experimental study reveals reduced low-temperature thermal conductivity in doped silicon films due to boundary scattering, highlighting critical design factors for nanoscale semiconductor devices.

Key Points

To determine how chemical impurities, free electrons, and boundary scattering govern thermal conduction in thin, free-standing single-crystal silicon layers across a broad temperature range.
Measured thermal conductivities along 3-μm-thick free-standing silicon films doped with boron and phosphorus at concentrations from 1×1017 to 3×1019 cm−3 at temperatures between 15 and 300 K.
Quantified dopant impurity concentrations using secondary ion mass spectroscopy (SIMS).
Modeled experimental results using phonon transport theory accounting for scattering mechanisms from impurities, free electrons, and layer boundaries.
Phonon-boundary scattering substantially reduces the thermal conductivity of 3-μm-thick silicon layers at low temperatures regardless of dopant concentration.
Comparisons indicate that unintentional impurities likely reduced thermal conductivities reported in earlier bulk silicon studies where doping was inferred from electrical resistivity rather than SIMS.

Cite This Study

Asheghi et al. (2002) studied this question.

synapsesocial.com/papers/6a78063bde5e3adfbdf757fa https://doi.org/10.1063/1.1458057

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Implication

Experimental study reveals reduced low-temperature thermal conductivity in doped silicon films due to boundary scattering, highlighting critical design factors for nanoscale semiconductor devices.

Thermal conduction in doped single-crystal silicon films

Discussion

Member takes

Implication

Key Points

Cite This Study

Thermal conduction in doped single-crystal silicon films

Discussion

Member takes

Implication

Key Points

Cite This Study

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