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January 1, 1993Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Langmuir probe measurements of a radio frequency induction plasma

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Authors

JHJeffrey HopwoodTufts UniversityCGC. R. GuarnieriIBM (United States)SWS. J. WhitehairIBM (United States)

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Hopwood et al. (1993) studied this question.

synapsesocial.com/papers/6a7a8befb2ad017e40322af9https://doi.org/10.1116/1.578282
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