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April 27, 1987Applied Physics Letters

Large volume, high density rf inductively coupled plasma

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Authors

RBR. W. BoswellAustralian National UniversityRPR. K. PorteousAustralian National University

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Boswell et al. (1987) studied this question.

synapsesocial.com/papers/6a7bb6f0a540d02696c295dchttps://doi.org/10.1063/1.98257
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