Growth of Carbon Nanotube by Thermal Chemical Vapor Deposition at Low Temperature with FeZrN Film

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Recently, the direct growth of carbon nanotubes on a glass substrate by thermal chemical vapor deposition (CVD) at low temperatures has been studied for the fabrication of field emission displays (FEDs). We achieved the synthesis of carbon nanotubes on soda lime glass at low temperatures (500–550°C) by a novel granulation method using FeZrN film. The FeZrN film is amorphia direct after sputtering, however, it changes into crystalloid to separate out Fe fine particles by thermal treatment. The characteristic was applied to successfully make the precursor of carbon nanotubes. The emission was also obtained and the turn-on electron field was approximately 3 V/µm.