Superconductor Wiring in Multichip Module for Josephson LSI Circuits

Nb/polyimide stacked layers on a multilayer ceramic substrate makes it possible to fabricate superconducting off-chip wiring for control signal lines. This superconducting multichip module (SuperMCM) also provides matching circuits for the clock signal and DC bias circuits beneath the superconducting transmission lines. The first prototype SuperMCM in the world successfully made,which has been designed to drive Josephson LSI chips at the highest clock frequency of 1.2 GHz.