Synthesis of ordinary-and inclined-texture zinc oxide films in an inhomogeneous gas-discharge plasma

Zinc oxide films having ordinary and inclined texture were grown on extended amorphous substrates. It was shown that a desired structure can be provided by controlling charged particle fluxes with the substrate remaining parallel to the target plane. Experiments were performed in a dc magnetron sputterer in a mixture of argon and oxygen. The textured films were studied by X-ray diffraction and by exciting longitudinal and shear bulk acoustic waves.