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March 1, 1981Japanese Journal of Applied Physics

High-Energy Neutral Atoms in the Sputtering of ZnO

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KTKikuo TominagaKeio UniversityNUNozomu UeshibaInternational Society of AutomationYSYoshihiro ShintaniTokushima University

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Tominaga et al. (1981) studied this question.

synapsesocial.com/papers/6a7ca37280d29ce2cbfab3e1https://doi.org/10.1143/jjap.20.519
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Also Consider

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  1. 1Experiments on the length of the cathode dark space with varying current densities and pressures in different gases1907 · 68 citations
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  3. 3Preparation of ZnO Thin-Film Transducers by Vapor Transport1968 · 29 citations
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  5. 5High Resistivity Transparent ZnO Thin Films1970 · 92 citations