For the first time, mixed mode simulation is used to optimize the design of ultrathin-body dual-gate metal source/drain 25-nm CMOS, showing an advantage for source/drain-to-gate underlap, rather than overlap. The effect of source/drain workfunction and silicon thickness on the optimal underlap, and on the resulting circuit speed, is examined. A substantial performance advantage versus doped source/drain is demonstrated.
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Connelly et al. (2003) studied this question.
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