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Ion implantation in InSb forms a surface layer which looks like a sponge. We show that this structure is related to an elevation of the surface by as much as 2 μm.In this perturbated layer, large voids typically 50 Å in diameter were observed by TEM. We have studied the evolution of this void formation as a function of the mass, the energy, and the dose of ions.
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Destéfanis et al. (1980) studied this question.
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