Laser-Driven Movement of Three-Dimensional Microstructures Generated by Laser Rapid Prototyping

Three-dimensional microstructures consisting of aluminum oxide and aluminum were fabricated by laser-induced direct-write deposition from the gas phase. Trimethylamine alane and oxygen were used as precursors. Thermal expansion forces resulting from suitable laser irradiation were used to drive the movement of microstructure parts. Applications include micromechanical actuators, such as microtweezers and micromotors. The one-step nature of the laser direct-write process allows rapid prototyping of such devices.