The authors report a novel method for fabricating proton exchanged LiNbO3 ridge waveguides by the wet etching of proton-exchanged LiNbO3. To demonstrate a simple and easy application of the LiNbO3 ridge waveguide, a Mach-Zehnder interferometric modulator with a selfaligned electrode was fabricated.
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Lee et al. (1995) studied this question.
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