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January 1, 2001Electrochemical and Solid-State Letters

Effects of Excimer Laser Dopant Activation on Low Temperature Polysilicon Thin-Film Transistors with Lightly Doped Drains

C. H. Tseng Ching‐Wei Lin Ting-Kuo Chang Huang‐Chung Cheng Albert Chin

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Abstract

Effects of Excimer Laser Dopant Activation on Low Temperature Polysilicon Thin-Film Transistors with Lightly Doped Drains , Tseng, Chang-Ho, Lin, Ching-Wei, Chang, Ting-Kuo, Cheng, Huang-Chung, Chin, Albert

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Tseng et al. (2001) studied this question.

synapsesocial.com/papers/6a7e2d183a6a8ebbaf3990cd https://doi.org/10.1149/1.1405997

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