Submicrometer thin gate oxide P-channel transistors with P⁺polysilicon gates for VLSI applications

Submicrometer p-channel transistors have been fabricated using thin (150 Å) gate oxide and p+ polysilicon gates. Favorable device characteristics have been achieved for L(eff) as low as 0.4 µm. P+ gate was formed under different processing conditions. Data showed negligible boron penetration through the thin oxide. Two-dimensional simulations demonstrated the advantages of p+ poly in reducing short channel effects. Experimental results from three device lots with different processing conditions showed good subthreshold slope and low leakage current, even for low threshold voltages. VTversus L(eff) showed much less threshold drop than was seen using n+ poly. Device characteristics were robust with respect to processing variations.