Preparation of Pb(Zr,Ti)O3 thin films by an electron beam evaporation technique

Thin films of Pb(Zr,Ti)O3 have been fabricated on fused quartz or stainless steel substrates by an electron beam evaporation technique. The quality of the PZT films is examined by the x-ray diffraction technique. Observation of the D-E hysteresis loop has shown the films to be ferroelectric. Dielectric anomaly of the film on a stainless steel substrate has been observed around 340 °C.