Quantitative Surface Atomic Structure Analysis by Low-Energy Ion Scattering Spectroscopy (ISS)

Surface atomic structure analysis by low-energy ion scattering spectroscopy (ISS) is reviewed, with particular emphasis on quantitative surface atomic structure analysis by ISS. The important differences between ISS and Rutherford backscattering spectroscopy (RBS), some basic characteristics of ISS, a special type of ISS called impact-collision ion scattering spectroscopy (ICISS), and the general features of the shadow cone in the energy range of ISS are discussed as a basis for the description of particular examples of ISS studies which follow. The examples are mainly concerned with the analysis of the atomic arrangement, defect structure, thermal vibration, and electron spatial distribution of the (001) and (111) surfaces of TiC.