Effect of step edge transition rates and anisotropy in simulations of epitaxial growth

The results of a hybrid rate equation/Monte Carlo simulation of epitaxial growth on vicinal surfaces is presented. The effect on surface morphology of changing transition rates at step edges, of changing detachment rates from step edges and clusters, and of adding anisotropy to the diffusion and incorporation kinetics at step edges and islands was studied. The effect of the transition rates on surface morphology are discussed in terms of a balance between growth by nucleation and coalescence of islands and by the propagation of steps.