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April 1, 1984Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Barrier layers: Principles and applications in microelectronics

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MWM. WittmerUniversity of Bern

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M. Wittmer (1984) studied this question.

synapsesocial.com/papers/6a8256cbcbd7585844ac90ee https://doi.org/10.1116/1.572580

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