Silicon nitride microclips for the kinematic location of optic fibres in silicon V-shaped grooves

Flexible silicon nitride clips are used to hold single mode optical fibres in position in grooves etched in silicon substrates to connect either subsurface or surface mounted optical components. The fabrication process for the buried fibre connector requires only one lithographic step, and a silicon substrate coated with a 3 m thick silicon nitride film. The light coupled between two single mode optic fibres buried in the same V groove has been measured as a function of the separation of the ends of the fibres. The Young's modulus and mechanical properties of silicon nitride from various sources have been measured using the clips. In another process using two lithographic steps a clipped fibre is made having the fibre core level with the silicon surface or up to 20 m above it, and the tolerances are sufficiently tight for optical system manufacture. Light coupling has been demonstrated between a semiconductor laser and a fibre. The clip technology is versatile and tolerant of lateral and angular misalignments during insertion. Fabrication and mechanical design rules for the silicon nitride clip technology are summarized, and possible applications in fibre connection, waveguide sensor and telecommunication systems are discussed.