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March 1, 1996IEEE Journal of Solid-State Circuits

Surface micromachined accelerometers

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Authors

BBB.E. BoserUniversity of California, BerkeleyRHRoger T. HoweKnexus Research (United States)

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Boser et al. (1996) studied this question.

synapsesocial.com/papers/6a82e602aab30c8fb7b28a3chttps://doi.org/10.1109/4.494198
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