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March 1, 2003Journal of Applied PhysicsOpen Access

Particle-in-cell/Monte Carlo simulation of a capacitively coupled radio frequency Ar/CF4 discharge: Effect of gas composition

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Authors

VGVioleta GeorgievaImec the NetherlandsABAnnemie BogaertsTokyo Institute of TechnologyRGR. GijbelsUniversity of Antwerp

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Georgieva et al. (2003) studied this question.

synapsesocial.com/papers/6a82f97088eff2bd7befdb93https://doi.org/10.1063/1.1542920
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  1. 1Continuum modeling of radio-frequency glow discharges. I. Theory and results for electropositive and electronegative gases1992 · 223 citations
  2. 2Measurements of the electron energy distribution function in an Ar/CF4 inductively coupled plasma2001 · 16 citations
  3. 3Electron Impact Cross Section Data for Carbon Tetrafluoride1994 · 127 citations
  4. 4Negative ions in a radio-frequency plasma in CF 41991 · 37 citations
  5. 5Probe measurements and global model of inductively coupled Ar/CF4discharges1999 · 89 citations