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September 1, 2001Journal of Applied Physics

Measurements of the electron energy distribution function in an Ar/CF4 inductively coupled plasma

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MBM. BowdenCulham Centre for Fusion EnergyRTR. TabataPSPradoong SuanpootMaejo University

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Bowden et al. (2001) studied this question.

synapsesocial.com/papers/6a9c5d7380b31b2c0d76dbachttps://doi.org/10.1063/1.1398775
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