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August 1, 1995Plasma Sources Science and TechnologyOpen Access

The electron-energy distribution function in a shielded argon radiofrequency inductive discharge

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Authors

VGValery GodyakClark UniversityRPR. B. PiejakOSRAM (United States)BAB. M. AlexandrovichUniversity of Michigan

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Godyak et al. (1995) studied this question.

synapsesocial.com/papers/6a958e7fe0f3813aa076998fhttps://doi.org/10.1088/0963-0252/4/3/002
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