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September 1, 1990Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

I n s i t u simultaneous radio frequency discharge power measurements

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Authors

VGValery GodyakClark UniversityRPR. B. PiejakOSRAM (United States)

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Godyak et al. (1990) studied this question.

synapsesocial.com/papers/6a893555d76717fba3eb15b3https://doi.org/10.1116/1.576457
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