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May 1, 1997Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Determination of electron temperatures in plasmas by multiple rare gas optical emission, and implications for advanced actinometry

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MMM. V. MalyshevNokia (United States)VDVincent M. DonnellyUniversity of Houston

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Malyshev et al. (1997) studied this question.

synapsesocial.com/papers/6a893555d76717fba3eb15aahttps://doi.org/10.1116/1.580682
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